Beschreibung:
This book deals with 3D nanodevices such as nanowire and nanosheet transistors at 7 nm and smaller technology nodes. The book focuses on how to set up 3D TCAD simulation tools, from mask layout to process and device simulation, including fabless intelligent manufacturing.
1. Introduction 2. Fabless Intelligent Manufacturing 3. Simulation Environment 4. Nanowire Transistors 5. Nanosheet Transistors 6. III-Nitride Flexible Electronic Devices 7. FDSOI RF Flexible Electronics 8. Simulation at Atomic Scale