The requirements of high precision and of high-quality components and devices in meeting the needs of modern industry and society in disciplines such as semiconductors, optics, nanotechnology, MEMS, manufacturing, biomedical and environmental engineering, make measurement technology and intelligent instruments (which sense, measure and report), more important than ever, and essential for the rapid development of information technology. Following the lead of the previous five publications (1989, 1993, 1996, 1998, 2001) in the series, "e;Measurement Technology and Intelligent Instruments"e;, this book presents the most recent advances in this important field. In all, 123 papers were contributed from many regions of the world; including China, Taiwan (China), Japan, Russia, Hong Kong (China), Germany, Australia, Austria, Canada, Korea, Poland, Slovakia and the UK and US.The topics covered include measurements for advanced materials, micro and nano measurement, biomedical and environmental measurement, optical precision measurement, form error, displacement and angle measurement, on-line and in-process measurement, micro and nano surface metrology, flow and thermal measurement, sensing systems, mechanical and physical quantity measurement, data, signal and image processing for precision measurement: covering novel designs and techniques in sensor and sensing systems and investigations of the characteristics and performances of precision sensor and sensing systems. The book presents the newest information, for application by active researchers and engineers, and forms the basis for further research in this field which is aimed at creating new and practical instrument systems and processes possessing enhanced functionality, precision and performance; all at reduced cost.