Silicon Carbide Microelectromechanical Systems for Harsh Environments
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ISBN-13:
9781860946240
Veröffentl:
2006
Erscheinungsdatum:
30.06.2006
Seiten:
192
Autor:
Rebecca Cheung
Gewicht:
490 g
Format:
230x160x20 mm
Sprache:
Englisch
Beschreibung:
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.
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