Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and plasma processing; plasma diagnostics for electrical discharge light sources; as well as Langmuir probes. The text also describes the mass spectroscopy of plasmas, microwave diagnostics, paramagnetic resonance diagnostics, and diagnostics in thermal plasma processing. Electrical engineers, nuclear engineers, microwave engineers, chemists, and technical personnel in universities, industry, and national laboratories will find the book invaluable.

ContributorsPreface1 Optical Diagnostic Techniques for Low Pressure Plasmas and Plasma Processing I. Introduction II. Plasma-Induced Optical Emission III. Absorption Spectroscopy IV. Laser Techniques V. Optical Techniques for Plasma-Surface Interactions VI. Summary VII. Acknowledgements References2 Plasma Diagnostics in Electric Discharge Light Sources I. Introduction II. Diagnostic Techniques Employed III. Summary and Conclusions IV. Acknowledgements References3 How Langmuir Probes Work I. Introduction II. Interpretation of Semi-Infinite Planar Langmuir Probe Data III. Effects of Finite Probe Size and Shape IV. Effects of Ion-Neutral Collisions V. Probes in Magnetic Fields VI. Secondary Electron Effects VII. Emissive Probes VIII. Probe Perturbations IX. Fluctuating Plasma Potentials X. Probe Contamination XI. Langmuir Probe Circuits XII. Direct Electron Temperature Measurements XIII. Directional Probe XIV. Conclusion XV. Acknowledgements References4 Mass Spectrometry of Plasmas I. Introduction II. Plasma Flux Analysis III. Partial Pressure Analysis IV. Flux Analysis of Plasmas: Energy Selection and Mass Filtering V. Mass Filtering VI. Flux Analysis: Neutral Species VII. Experimental Considerations and Applications: Flux Analysis of Plasmas VIII. Experimental Considerations and Applications: Partial Pressure Analysis IX. Acknowledgements References5 Microwave Diagnostics I. Introduction II. How to Get Started: A Simple Microwave Diagnostics Apparatus III. Cavity and Waveguide Diagnostic Techniques IV. Interferometric Techniques V. Microwave Scattering and Radiometry VI. Plasma Waves and Their Applications in Microwave Diagnostics References6 Paramagnetic Resonance as a Plasma Discharge Diagnostic I. Introduction II. Basic Theory III. Application IV. Discussion V. Acknowledgements References7 Diagnostics in Thermal Plasma Processing I. Introduction II. Methods for Production and Characterization of Plasmas III. Specific Problems Related to Measurements under Thermal Plasma Conditions IV. Plasma Flow Diagnostics V. Measurements of Particle Parameters in Thermal Plasmas VI. Conclusions VII. Acknowledgements References