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Fundamental Principles of Engineering Nanometrology
ISBN-13:
9781455777501
Veröffentl:
2014
Seiten:
384
Autor:
Richard Leach
eBook Typ:
EPUB
eBook Format:
EPUB
Kopierschutz:
2 - DRM Adobe
Sprache:
Englisch
Beschreibung:
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques.
1. Introduction to metrology for micro- and nanotechnology 2. Some basics of measurement 3. Precision measurement instrumentation - some design principles 4. Length traceability using interferometry 5. Displacement measurement 6. Surface topography measurement instrumentation 7. Scanning probe and particle beam microscopy 8. Surface topography characterization 9. Co-ordinate metrology 10. Mass and force measurement
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