Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS reliability because of specific high volume manufacturing experience generally view the details of a reliability program as a competitive advantage and are reluctant to share it. MEMS Reliability focuses on the reliability and manufacturability of MEMS at a fundamental product engineering level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (PoF), accelerated testing and lifetime prediction, design strategies for improving yield, design for reliability (DfR), packaging and testing. Drawing upon years of practical experience and using numerous examples and illustrative applications, Allyson Hartzell, Mark da Silva, and Herbert Shea cover:

Demonstrates how to design MEMs for reliability during the product life cycle focusing CAD methodologies and system level architecture

Introduction.- Reliability /Weibull, bathtub curve, basics (What is reliability?).- Failure Modes and Physics of Failure (POF).- Strategies for identifying root cause (FMEA).- Manufacturing Processes & Procedures.- Testing & Qualification Processes & Procedures.- Improving Reliability: Techniques and Tools.- Design for Reliability (DFR).