The book integrates physics and vacuum technology to facilitate a comprehensive understanding of physical phenomena and quantities that form the base knowledge in vacuum production, methodology measurements of vacuum quantities, and fundamentals in deposition methods, as well as material analytical techniques.

Part 1: Physics of Low pressures. Fundamental Quantities in Vacuum Physics. Molecular Kinetic Theory and its Implications. Thermodynamics of Gases at Low Pressures. Real Gases. Transfer Phenomena in Gases at Vacuum Conditions. Molecular Collisions. Gas Flow at Vacuum Conditions. Sorption. Pumping Vacuum Systems. Part 2: Vacuum Production. Categorization of Vacuum Pumps. Mechanical Displacement Pumps. Dry Displacement pumps. Mechanical Kinetic Pumps. Kinetic Propellant Pumps and Accessories. Capture Pumps. Part 3: Low Pressure Measurements. Introduction into the Methodology of Low Pressure Measurements. Force Gauges with Manometric Fluids. Force Gauges with Elastic Deformation Elements. Force Gauges with Solid Sensing Elements. Viscosity Molecular Gauges. Vacuum Thermal Gauges. Ionization Gauges with Hot Filaments. Electric Discharge Vacuum Gauges. Vacuum Gauges with Radioactive Emitters. Partial Pressure Measurement at Vacuum Conditions. Energy Analyzers of Electrically Charged Particles. Gas Flow Measurements and Controls. Leak Detection. Appendix. Index. List of Tables.