Part of the Wiley-Royal Microscopical Society Series, this book discusses the rapidly developing cutting-edge field of low-voltage microscopy, a field that has only recently emerged due to the rapid developments in the electron optics design and image processing.It serves as a guide for current and new microscopists and materials scientists who are active in the field of nanotechnology, and presents applications in nanotechnology and research of surface-related phenomena, allowing researches to observe materials as never before.

List of Contributors ixPreface xi1 Introduction to the Theory and Advantages of Low Voltage Electron Microscopy 1David C. Bell and Natasha Erdman1.1 Introduction 11.2 Historical Perspective 21.3 Beam Interaction with Specimen--Elastic and Inelastic Scattering 31.4 Instrument Configuration 111.5 Influence of Electron Optics Aberrations at Low Voltages 121.6 SEM Imaging at Low Voltages 161.7 TEM/STEM Imaging and Analysis at Low Voltages 261.8 Conclusion 27References 282 SEM Instrumentation Developments for Low kV Imaging and Microanalysis 31Natasha Erdman and David C. Bell2.1 Introduction 312.2 The Electron Source 332.3 SEM Column Design Considerations 362.4 Beam Deceleration 412.5 Novel Detector Options and Energy Filters 432.6 Low Voltage STEM in SEM 482.7 Aberration Correction in SEM 502.8 Conclusions 53References 533 Extreme High-Resolution (XHR) SEM Using a Beam Monochromator 57Richard J. Young, Gerard N.A. van Veen, Alexander Henstra and Lubomir Tuma3.1 Introduction 573.2 Limitations in Low Voltage SEM Performance 583.3 Beam Monochromator Design and Implementation 593.4 XHR Systems and Applications 633.5 Conclusions 69Acknowledgements 70References 704 The Application of Low-Voltage SEM--From Nanotechnology to Biological Research 73Natasha Erdman and David C. Bell4.1 Introduction 734.2 Specimen Preparation Considerations 744.3 Nanomaterials Applications 764.4 Beam Sensitive Materials 844.5 Semiconductor Materials 854.6 Biological Specimens 874.7 Low-Voltage Microanalysis 914.8 Conclusions 92References 935 Low Voltage High-Resolution Transmission Electron Microscopy 97David C. Bell5.1 Introduction 975.2 So How Low is Low? 995.3 The Effect of Chromatic Aberration and Chromatic Aberration Correction 1005.4 The Electron Monochromator 1035.5 Theoretical Tradeoffs of Low kV Imaging 1055.6 Our Experience at 40 keV LV-HREM 1095.7 Examples of LV-HREM Imaging 1105.8 Conclusions 114References 1166 Gentle STEM of Single Atoms: Low keV Imaging and Analysis at Ultimate Detection Limits 119Ondrej L. Krivanek, Wu Zhou, Matthew F. Chisholm, Juan Carlos Idrobo, Tracy C. Lovejoy, Quentin M. Ramasse and Niklas Dellby6.1 Introduction 1196.2 Optimizing STEM Resolution and Probe Current at Low Primary Energies 1216.3 STEM Image Formation 1286.4 Gentle STEM Applications 1356.5 Discussion 1546.6 Conclusion 156Acknowledgements 157References 1577 Low Voltage Scanning Transmission Electron Microscopy of Oxide Interfaces 163Robert Klie7.1 Introduction 1637.2 Methods and Instrumentation 1667.3 Low Voltage Imaging and Spectroscopy 1687.4 Summary 180Acknowledgements 180References 1808 What's Next? The Future Directions in Low Voltage Electron Microscopy 185David C. Bell and Natasha Erdman8.1 Introduction 1858.2 Unique Low Voltage SEM and TEM Instruments 1868.3 Cameras, Detectors, and Other Accessories 1928.4 Conclusions 198References 199Index 201