Optical Microscanners and Microspectrometers Using Thermal Bimorph Actuators
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ISBN-13:
9780792376552
Veröffentl:
2002
Erscheinungsdatum:
31.01.2002
Seiten:
268
Autor:
Gerhard Lammel
Gewicht:
576 g
Format:
234x156x18 mm
Sprache:
Englisch
Beschreibung:
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.
1 Introduction.- 2 Basics for a thermally actuated micromirror.- 3 Microscanner technology.- 4 One-dimensional microscanner.- 5 Two-dimensional microscanner.- 6 Advanced Optical Filters of Porous Silicon.- 7 Micromachining using porous Silicon.- 8 Tunable Optical Filter and IR Gas Spectroscopy.- 9 Conclusions and outlook.- Appendices.- A.1 Complement to the curvature calculation due to residual stress.- A.2 Complement to the static temperature distribution calculation.- A.3 Large deflections.- References.- Symbols and Abbreviations.- Glossary of terms.- Acknowledgments.
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