Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition
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ISBN-13:
9780071821018
Veröffentl:
2014
Erscheinungsdatum:
07.01.2014
Seiten:
576
Autor:
Peter Van Zant
Gewicht:
1275 g
Format:
244x192x38 mm
Sprache:
Englisch
Beschreibung:
Fully revised to cover the latest advances in the field, Microchip Fabrication, Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors.
Ch 1. The Semiconductor IndustryCh 2. Properties of Semiconductor Materials and Chemicals Ch 3. Crystal Growth and Silicon Wafer PreparationCh 4. Overview of Wafer Fabrication Ch 5. Contamination Control Ch 6. Productivity and Process Yields Ch 7. Oxidation Ch 8. The Ten-Step Patterning Process--Surface Preparation to Exposure Ch 9. The Ten-Step Patterning Process--Developing to Final Inspection Ch 10. Advanced Photolithography Processes Ch 11. Doping Ch 12. Layer DepositionCh 13. MetalizationCh 14. Process and Device Evaluation Ch 15. The Business of Water Fabrication Ch 16. Introduction to Device and Integrated Circuit Formation Ch 17. Introduction to Integrated CircuitsCh 18. Packaging GlossaryIndex
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